This image is imagemapped.
Turn right from photo 67. RF power supply for RIE in left foreground. Xinix scanning spectrometer in upper left with plasma etcher below it to the right. Spare parts and vacuum system under bench. On right is a rapid thermal processor used for non-rectifying contact alloying. Door is open exposing quartz interiior which is glowing from being heated by the halogen lamps. Sort of like your high tech version of a Betty Crocker oven!
